한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2003년도 제25회 학술발표회 초록집
- /
- Pages.197-197
- /
- 2003
Preparation of Crystalline $Si_{1-x}Ge_x$ Thin Films at Low Substrate Temperature
- Yang, Sung-Chae (Division of Electronics & Information Engineering, Chonbuk National University) ;
- Chu, Byung-Yoon (Division of Electronics & Information Engineering, Chonbuk National University) ;
- Yatsui, Kiyoshi (Extreme Energy-Density Research Institute, Nagaoka University of Technology)
- 발행 : 2003.08.20