Photoluminescence properties by control of the oxygen content and thikness in $SiO_x/SiO_2$ superlattices prepared by ion beam sputtering

  • Yang, Moon-Seung (Department of physics, Korea Institute of Science and Technology(KAIST)) ;
  • Jhe, Ji-Hong (Department of physics, Korea Institute of Science and Technology(KAIST)) ;
  • Shin, Jung-H. (Department of physics, Korea Institute of Science and Technology(KAIST)) ;
  • Kim, Kyung-Joong (Nano Surface Group, Korea Research Institute of standards and Science(KRISS)) ;
  • Moon, Dae-Won (Nano Surface Group, Korea Research Institute of standards and Science(KRISS))
  • Published : 2003.08.20