Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2003.08a
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- Pages.88-88
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- 2003
In-situ XPS study of UHV-Atomic Layer Deposition of $TiO_2$ thin films on Si substrates using titanium isopropoxide and water
- Published : 2003.08.20
Abstract
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