Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2003.08a
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- Pages.67-67
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- 2003
Oxidation Mechanism of Si in the Growth of $SiO_x$ Thin Film by Ion Beam Sputter Deposition.
- Kim, Kyung-Joong (Nano Surface Group, KRISS, Department of Physics, KAIST) ;
- Moon, Dae-Won (Nano Surface Group, KRISS, Department of Physics, KAIST) ;
- Yang, Moon-Seung (Nano Surface Group, KRISS, Department of Physics, KAIST) ;
- Jhe, Ji-Hong (Nano Surface Group, KRISS, Department of Physics, KAIST) ;
- Shin, Jung-Hoon (Nano Surface Group, KRISS, Department of Physics, KAIST)
- Published : 2003.08.20
Abstract
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