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The Korean Vacuum Society
http://www.kvs.or.kr
Proceedings of the Korean Vacuum Society Conference
(한국진공학회:학술대회논문집)
2003.08a
/
Pages.38-39
/
2003
The Korean Vacuum Society (한국진공학회)
Initial oxynitridation and nitridation of silicon surfaces by NO and
$NH_3$
decomposition
Yeom, Han-Ung
;
Kim, Jeong-Won
;
Kim, Yu-Gwon
염한웅
(연세대학교 물리및응용물리사업단/원자선원자막연구단) ;
김정원
(연세대학교 물리및응용물리사업단/원자선원자막연구단) ;
김유권
(연세대학교 물리및응용물리사업단/원자선원자막연구단)
Published : 2003.08.20
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