Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2003.04a
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- Pages.1615-1620
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- 2003
Experimental Study of the Growth of the SiC Rod using LCVD
LCVD를 이용한 SiC 로드 성장에 관한 실험적 연구
- Published : 2003.04.23
Abstract
The purpose of the study is not only to establish experimental system for laser chemical vapor deposition but also to find the characteristics of SiC rod growth that is the beginning step in developing technology of 3 dimensional prototyping with laser chemical vapor deposition. In this study, SiC rod was generated with varying TMS pressure for 5 minutes. Deposition rates with varying TMS pressure, shapes of rods, surface roughness and component organization were investigated, in particular.
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