Development of UV-molding process to fabricate functional micro-optical components

기능성 마이크로 광 부품의 성형을 위한 UV 성형 공정 기술 개발

  • 김석민 (연세대학교 대학원 기계공학과) ;
  • 강신일 (연세대학교 기계공학부)
  • Published : 2003.04.23

Abstract

An experimental method is presented to maximize the replication quality of UV-molded micro-optical components. It is important to maximize the replication quality, because one can obtain the replicated micro-optical components with desired properties by accurate control of the shape. In the present study, a simple technique to avoid micro-air bubbles was first suggested. The effects of the UV-curing dose and the compression pressure on the replication quality of UV-molded structure were examined experimentally. Finally, as a practical application of the process design method, microlens arrays with diameters between 8 ${\mu}m$ and 96 ${\mu}m$ were fabricated by the present method, and the replication quality and the optical properties of the replicated microlens were measured and analyzed.

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