Proceedings of the KSME Conference (대한기계학회:학술대회논문집)

The Korean Society of Mechanical Engineers (대한기계학회)
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Localized Electro-chemical Micro Machining Using Ultra Short Pulses

초단펄스 전해 국부화를 이용한 미세 가공

  • 안세현 (서울대 대학원 기계항공공학부) ;
  • 최세환 (서울대 대학원 기계항공공학부) ;
  • 류시형 (서울대 대학원 기계항공공학부) ;
  • 최덕기 (강릉대 정밀기계공학과) ;
  • 주종남 (서울대 기계항공공학부)
  • Published : 2003.04.23
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Abstract

The possibility of micro/nano machining through electro-chemical process is discussed in this research. Electro-chemical dissolution region is localized within 1 ${\mu}m$ by applying ultra short pulses with tens of nanosecond duration. The effects of voltage, pulse duration, and pulse frequency on the localization distance are investigated. Localization distance can be manipulated by controlling the voltage and pulse duration, and various hole shapes are produced including stepped holes and taper free hole. High quality micro-hole with 8 ${\mu}m$ diameter with 20 ${\mu}m$ depth and micro-groove with 9 ${\mu}m$ width with 10 ${\mu}m$ depth are machined on 304 stainless steel.

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