Fabrication of Multi-functional Self-Assembled Monolayers by Microcontact Printing and Their Application for Electronic and Biological Devices

미세접촉인쇄기법을 이용한 다기능성 자기조립막 제작과 전자.생물소자로의 응용

  • 최대근 (한국과학기술원 생명화학공학과) ;
  • 유형균 (한국과학기술원 생명화학공학과) ;
  • 양승만 (한국과학기술원 생명화학공학과) ;
  • 조정대 (한국기계연구원 첨단산업기술연구부) ;
  • 이응숙 (한국기계연구원 지능형정밀기계연구부)
  • Published : 2003.04.23

Abstract

In this work, we fabricated various 2D metallic and polymeric nanopatterns with the feature resolution of sub-micrometer scale by using the method of microcontact printing ($\mu$ P) based on soft lithography. Silicon masters for the micromolding were made by e-beam lithography. Composite poly(dimethylsiloxane) (PDMS) molds were composed of a thin, hard layer supported by soft PDMS layer. Finally, monodisperse metal or polymer particles could be obtained in the prepared pattern for the application of electronic devices.

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