Analysis of anti-adhesion property in replication of patterns of sub-micrometers

Sub-micrometer 크기의 패턴의 복제시 발생되는 이형 특성의 분석

With the increasing demand for plastic micro components, micro-/nano-molding using the mother stamper has received much attention. If the replication temperature is too high, the adhesion between the stamper and the polymer melt may deteriorate the surface quality of the replicated part, excessively wearing down the stamper. In this paper, an experimental method analyzes the temperature dependency of the anti-adhesion property between the actual stamper with patterns of sub-micrometer and the polymer melt. As a practical example, a correlation between the contact angle of the stamper and the surface quality of the molded substrates as a function of the replication temperature, respectively, was obtained quantitatively.