Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2003.11a
- /
- Pages.1927-1931
- /
- 2003
Design and Multi-scale Analysis of Micro Contact Printing
미세접촉인쇄기법의 설계와 다중스케일해석
- Published : 2003.11.05
Abstract
Nanometer-sized structures are being applied to many fields including micro/nano electronics, optoelectronics, quantum computing, biosensors, etc. Micro contact printing is one of the most promising methods for manufacturing the nanometer-sized structures. The crucial element for the micro contact printing is the nano-resolution printing technique using polymeric stamps. In this study, a multi-scale analysis scheme for simulating the micro contact printing process is proposed and some useful analysis results are presented. Using the slip-link model [1], the dependency of viscoelasticity on molecular weight of polymer stamp is predicted. Deformation behaviors of polymeric stamps are analyzed using finite element method based upon the predicted viscoelastic properties.
Keywords