Design and Control of 3DOF High Precision Positioning System With Double L Type Flexure Hinge Module

High-precision position system is widely used in lots of fields such as semiconductor industry, biotechnology, display and other up-to-date industry field. One of the main issues is to have a long traveling range with precision. There are a few solutions. For instance, there are inchworm methods, lever principle. In this study, we use lever principle to amplify output displacement with a new mechanical amplification structure. We designed new type 3DOF stage with PZT actuator and capacitive sensor. Non-monolithic structure is suggested to obtain the convenience of assembly and modification. Driving parts are designed as modules that generate displacement amplification of each axis. Designed motion module consists of 3 flexure hinges and a PZT actuator with double L lever structure.