제어로봇시스템학회:학술대회논문집
- 제어로봇시스템학회 2003년도 ICCAS
- /
- Pages.1542-1546
- /
- 2003
Nanoparticle Manipulation Using Atomic Force Microscope and X-Y Stage
- Liu, T.S. (Department of Mechanical Engineering, National Chiao Tung University) ;
- Wen, B.J. (Department of Mechanical Engineering, National Chiao Tung University)
- 발행 : 2003.10.22
초록
Nanotechnology is an important challenge, for which nanoparticle manipulation plays an important role in the assembly of nano elements. In this study, the dynamic equation of system plant is established by van der Waals force, friction, capillary forces etc. To push nanoparticles, strain gauges are used as sensors to actuate an X-Y stage in an atomic force microscopy system. A strategy of pushing nanoparticles is developed based on sliding mode control. Moreover, afuzzy controller is responsible for compensating tip-particle contact loss according to feedback signals of a laser-detector system. According to position control result, experimental results of gold nanoparticle manipulation are presented.