Proceedings of the SAREK Conference (대한설비공학회:학술대회논문집)
- 2003.07a
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- Pages.196-196
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- 2003
A Study on the Effect of Friction Coefficient of Semiconductor Wafer Transportation for Air Levitation System
공기부상방식 반도체 웨이퍼 이송시스템의 마찰계수 영향에 관한 연구
- Moon In-ho (Department of Mechanical Engineering, Sungkyunkwan University) ;
- Hwang Young-kyu (Department of Mechanical Engineering, Sungkyunkwan University) ;
- Cho Sang-joon (Institute of Technology, Shinsung ENG Co. Ltd.) ;
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Kim Dong-kweon
(Institute of Technology, Shinsung ENG Co. Ltd.)
- Published : 2003.07.01
Abstract
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