한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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- Pages.182-185
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- 2003
$Cl_2/Ar$ 유도결합 플라즈마를 이용한 (Pb,Sr)$TiO_3$ 박막의 식각 특성
Etching properties of (Pb,Sr)$TiO_3$ thin films using $Cl_2/Ar$ inductively coupled plasma
- Kim, Gwan-Ha (Chung Ang University) ;
- Kim, Kyoung-Tae (Chung Ang University) ;
- Kim, Dong-Pyo (Chung Ang University) ;
- Kim, Chang-Il (Chung Ang University)
- 발행 : 2003.05.16
초록
Etching characteristics of (PB,Sr)