한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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- Pages.178-181
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- 2003
Inductively Coupled Plasma를 이용한 lead-zirconate-titanate 박막의 식각 손상 개선
The reduction of etching damage in lead-zirconate-titanate thin films using Inductively Coupled Plasma
- Lim, Kyu-Tae (Chung-Ang University) ;
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Kim, Kyoung-Tae
(Chung-Ang University) ;
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Kim, Dong-Pyo
(Chung-Ang University) ;
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Kim, Chang-Il
(Chung-Ang University)
- 발행 : 2003.05.16
초록
In this work, we etched PZT films with various additive gases (