한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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- Pages.154-157
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- 2003
산소 분압비에 따른 $TiO_2$ 박막의 특성평가
The properties of $TiO_2$ thin films by oxygen partial pressure
- Yang, Hyun-Hun (Mokpo National University, Dept. of Electrical Engineering) ;
- Lim, Jeong-Myung (Mokpo National University, Dept. of Electrical Engineering) ;
- Park, oung-Yun (Mokpo National University, Dept. of Electrical Engineering) ;
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Jeong, Woon-Jo
(Mokpo National University, Dept. of Electrical Engineering) ;
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Park, Gye-Choon
(Mokpo National University, Dept. of Electrical Engineering)
- 발행 : 2003.05.16
초록