Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2003.05c
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- Pages.111-115
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- 2003
A study on Fabrication of Ferroelectric SST Thin Films by Liquid Delivery MOCVD Process
Liquid Delivery MOCVD공정을 이용한 강유전체 SBT 박막의 제조기술에 관한 연구
- Kang, Dong-Kyun (Department of Materials Science and Engineering, Korea University) ;
- Paik, Seung-Kyu (Department of Materials Science and Engineering, Korea University) ;
- Kim, Hyoeng-Ki (Department of Materials Science and Engineering, Korea University) ;
- Kim, Byong-Ho (Department of Materials Science and Engineering, Korea University)
- Published : 2003.05.16
Abstract
200nm 정도의 두께를 가진 SBT 박막이 liquid delivery MOCVD 공정에 의해 (111) oriented Pt/Ti/