Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Electrical Properties of Inductively Coupled Plasma by Argon Pressurebstract

아르곤 압력에 따른 유도결합형 폴라즈마의 전기적 특성

  • Lee, Y.H. (School of Electrical Electronic and Information Engineering, WonKwang University) ;
  • Her, I.S. (School of Electrical Electronic and Information Engineering, WonKwang University) ;
  • Jo, J.U. (School of Electrical Electronic and Information Engineering, WonKwang University) ;
  • Kim, K.S. (School of Electrical Electronic and Information Engineering, WonKwang University) ;
  • Lee, J.C. (School of Electrical Electronic and Information Engineering, WonKwang University) ;
  • Choi, Y.S. (School of Electrical Electronic and Information Engineering, WonKwang University) ;
  • Park, D.H. (School of Electrical Electronic and Information Engineering, WonKwang University)
  • 이영환 (원광대학교 전기 전자 및 정보 공학부) ;
  • 허인성 (원광대학교 전기 전자 및 정보 공학부) ;
  • 조주웅 (원광대학교 전기 전자 및 정보 공학부) ;
  • 김광수 (원광대학교 전기 전자 및 정보 공학부) ;
  • 이종찬 (원광대학교 전기 전자 및 정보 공학부) ;
  • 최용성 (원광대학교 전기 전자 및 정보 공학부) ;
  • 박대희 (원광대학교 전기 전자 및 정보 공학부)
  • Published : 2003.05.30
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Abstract

In this paper, using a Langmuir probe Ar gas characteristic of electrodeless fluorescent lamp which used an inductively coupled plasma were investigated. The RF output changed into 5-50W in 13.56MHz. At this time internal plasma voltage of the chamber and probe current were measured while changing in -70V - +70V with a supply voltage by Langmuir probe. If pressure of Ar gas was increased, the electric current tended to decrease. Also, an electric current was increased according to an increase of a RF output.

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