한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2003년도 International Meeting on Information Display
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- Pages.683-685
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- 2003
Characteristics of Surface Roughness as a Film Thickness and Planarization of SLS Poly-Si Films
- Sohn, Choong-Yong (Basic Research Lab., Electronics and Telecommunications Research Institute) ;
- Kim, Yong-Hae (Basic Research Lab., Electronics and Telecommunications Research Institute) ;
- Ko, Young-Wook (Basic Research Lab., Electronics and Telecommunications Research Institute) ;
- Chung, Choong-Heui (Basic Research Lab., Electronics and Telecommunications Research Institute) ;
- Hwang, Chi-Sun (Basic Research Lab., Electronics and Telecommunications Research Institute) ;
- Song, Yoon-Song (Basic Research Lab., Electronics and Telecommunications Research Institute) ;
- Lee, Jin-Ho (Basic Research Lab., Electronics and Telecommunications Research Institute)
- 발행 : 2003.07.09
초록
We report on a surface planarization process that produces more planar surface than previous sequential lateral solidification crystallized poly silicon films. By applying the single shot laser irradiation with optimum energy density (
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