한국윤활학회:학술대회논문집 (Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference)
- 한국윤활학회 2003년도 학술대회지
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- Pages.368-376
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- 2003
PE-CVD방법을 이용한 DLC 박막의 기계적특성 평가
Mechanical Property Evaluation of Diamond-like Carbon Coated by PE-CVD
- Kang Seog Ju (Graduate School, Department of Mechanical Engineering, Kyungpook National University) ;
- Yi Jin-Woo (Graduate School, Department of Mechanical Engineering, Kyungpook National University) ;
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Kim Seock Sam
(Department of Mechanical Engineering, Kyungpook National University)
- 발행 : 2003.11.01
초록
In this research, DLC thin films are produced as several hundred nm thickness by PE-CVD method. And then these thin films are estimated tribological characteristics to find out useful possibilities as a protecting film for high-quality function and life extension at MEMs by mechanical properties observation . These are measured thickness and residual stress of DLC coating. Compared after measuring friction coefficient, adhesion force, hardness, cohesive force of coating films. As results all test, we can decide several conclusions. First, friction coefficient decreased, as the load increased. otherwise, friction coefficient increased, as thickness of coating film increased under low load