한국정보통신설비학회:학술대회논문집
- 한국정보통신설비학회 2003년도 하계학술대회
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- Pages.93-95
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- 2003
정보통신 소자 응용을 위한 단결정 실리콘 마이크로 미러 어레이
Single crystalline silicon micyomirror array for data communication applications
- Jang Yun-Ho (School of Electrical Engineering and Computer Science, Seoul National University) ;
- Lee Kook-Nyung (School of Chemical Engineering, Seoul National University) ;
- Kim Yong-Kweon (School of Electrical Engineering and Computer Science, Seoul National University)
- 발행 : 2003.08.01
초록
We have designed and fabricated a micromirror array using single crystalline silicon (SCS) for data communication applications. The mirror array has
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