한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

결정성 질화탄소막의 습도 감지특성에 관한 연구

A study on the humidity sensing properties of crystalline carbon nitride films

  • 이지공 (경남대학교 전기전자공학부) ;
  • 하세근 (경남대학교 전기전자공학부) ;
  • 김정훈 (경남대학교 전기전자공학부) ;
  • 이성필 (경남대학교 전기전자공학부)
  • Lee, Ji-Gong (Department of Electrical and Electronic Engineering, Kyungnam University) ;
  • Ha, Se-Guen (Department of Electrical and Electronic Engineering, Kyungnam University) ;
  • Kim, Jung-Hun (Department of Electrical and Electronic Engineering, Kyungnam University) ;
  • Lee, Sung-Pil (Department of Electrical and Electronic Engineering, Kyungnam University)
  • 발행 : 2003.11.13
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초록

Crystalline carbon nitride films have been attempted for an application of humidity sensors. The films were deposited on $Al_2O_3$ substrate having interdigitated electrodes by reactive RF magnetron sputtering system. The film revealed a good humidity-resistance characteristics as well as humidity-capacitance ones in the humidity range of $10\;{\sim}\;95\;RH(%)$. Temperature dependence was also investigated. These results suggest that carbon nitride film have a possibility for a new humidity-sensitive materials.

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