Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2003.11a
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- Pages.23-26
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- 2003
Effect of the MgO buffer layer for MFIS structure using the BLT thin film
BLT 박막을 이용한 MFIS 구조에서 MgO buffer layer의 영향
- Lee, Jung-Mi (Chung-Ang University) ;
- Kim, Kyoung-Tae (Chung-Ang University) ;
- Kim, Chang-Il (Chung-Ang University)
- Published : 2003.11.13
Abstract
The BLT thin film and MgO buffer layer were fabricated using a metalorganic decomposition method and the DC sputtering technique. The MgO thin film was deposited as a buffer layer on