한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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- Pages.15-18
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- 2003
NMOS 게이트 전극에 사용될 Ta-Ti 합금의 특성
Characteristics of Ta-Ti alloy Metal for NMOS Gate Electrodes
- Kang, Young-Sub (Hankook Aviation University, Department of Electronic Engineering) ;
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Lee, Chung-Keun
(Hankook Aviation University, Department of Electronic Engineering) ;
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Kim, Jae-Young
(Hankook Aviation University, Department of Electronic Engineering) ;
- Hong, Shin-Nam (Hankook Aviation University, Department of Electronic Engineering)
- 발행 : 2003.11.13
초록
Ta-Ti metal alloy is proposed for alternate gate electrode of ULSI MOS device. Ta-Ti alloy was deposited directly on