Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2003.07b
- /
- Pages.995-998
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- 2003
Poly-Si Thin Film and Solar Cells by VHF-PECVD
VHF-PECVD를 이용한 다결정 실리콘 박막 증착 및 태양전지 제조
-
Lee, J.C.
(KIER Photovoltaic Research Center)
;
- Chung, Y.S. (KIER Photovoltaic Research Center) ;
-
Kim, S.K.
(KIER Photovoltaic Research Center)
;
-
Youn, K.H.
(KIER Photovoltaic Research Center)
;
-
Park, I.J.
(KIER Photovoltaic Research Center)
;
- Song, J.S. (KIER Photovoltaic Research Center) ;
- Kwon, S.W. (KAIST) ;
- Lim, K.S. (KAIST)
-
이정철
(한국에너지기술연구원 태양광연구센터)
;
- 정연식 (한국에너지기술연구원 태양광연구센터) ;
-
김석기
(한국에너지기술연구원 태양광연구센터)
;
-
윤경훈
(한국에너지기술연구원 태양광연구센터)
;
-
송진수
(한국에너지기술연구원 태양광연구센터)
;
- 박이준 (한국에너지기술연구원 태양광연구센터) ;
- 권성원 (한국과학기술원) ;
- 임광수 (한국과학기술원)
- Published : 2003.07.10
Abstract
This paper presents the deposition of poly-Si thin-film and fabrication of a solar cell by VHF-PECVD method. The poly-Si thin films. and pin-type solar cells are fabricated using multi-chamber cluster tool system. A 7.4% conversion efficiency was achieved from poly-Si thin film solar cells with total thickness less than