한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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- Pages.961-964
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- 2003
InGaAs 도파로형 광다이오드의 암전류에 대한 열 처리 효과에 관한 연구
The Study of Annealing Effect on the Dark Current of InGaAs Waveguide Photodiodes
- Lee, Bong-Yong (Yonsei Univ.) ;
- Joo, Han-Sung (Yonsei Univ.) ;
- Yun, Il-Gu (Yonsei Univ.)
- 발행 : 2003.07.10
초록
This paper presents the temperature annealing effect on the dark current of the InGaAs waveguide photodiodes, which are developed for high-speed optical receivers. The interesting experimental phenomena were observed that the dark current is significantly decreased and the breakdown voltage is slightly increased after annealing at