한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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- Pages.884-887
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- 2003
후막저항의 기하학적 위치에 따른 압력센서의 출력특성 고찰
A Study of Deflection of Ceramic Diaphragm for a Pressure Sensor
- Lee, Seong-Jae (Daelim College) ;
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Lee, Deuk-Young
(Daelim College) ;
- Ha, Young-Sun (Daelim College)
- 발행 : 2003.07.10
초록
Strain gages were widely used transducers. Essentially a strain gage was an electric element to which an appropriate type was attached. Strain was sensed by gages and provided electrical output proportional to applied forced. This paper describes the recent development of a thick film strain gage ceramic pressure sensors. The thick film resistors as strain gage in the Wheatstone bridge were fabricated with a novel mixture of ruthenium. The thick-film technology of resistors were printed on the ceramic diaphragm back side by screen printing and cured at