한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

이온 빔 스퍼터링을 이용한 $SnO_2$계 박막 가스 센서에 관한 연구

Thin film $SnO_2$ gas sensor Fabricated by Ion Beam Sputtering Deposition

  • 차동관 (영남대학교 재료금속공학부) ;
  • 민봉기 (영남대학교 재료금속공학부) ;
  • 최순돈 (영남대학교 재료금속공학부) ;
  • 이희영 (영남대학교 재료금속공학부)
  • Cha, Dong-Kwan (School of Metallurgical and Meterials Engineering, Yeungnam Univ.) ;
  • Min, Bong-Ki (School of Metallurgical and Meterials Engineering, Yeungnam Univ.) ;
  • Choi, Soon-Don (School of Metallurgical and Meterials Engineering, Yeungnam Univ.) ;
  • Lee, Hee-Young (School of Metallurgical and Meterials Engineering, Yeungnam Univ.)
  • 발행 : 2003.07.10
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초록

Thin film $SnO_2$ Gas Sensor was fabricated by using ion beam sputtering and ultra thin film Pt catalyst of $45{\AA}$ was deposited on $SnO_2$ thin film. The effects of annealing temperature on the structural properies of $SnO_2$ were investigated using the X-ray diffraction. Using SEM, microstructures of thin film were investigated. The good gas sensitivity is shown when annealing condition is $650^{\circ}C$, 5hr and ultra thin film Pt catalyst thickness is $45{\AA}$.

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