Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2003.07b
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- Pages.846-850
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- 2003
Thin film $SnO_2$ gas sensor Fabricated by Ion Beam Sputtering Deposition
이온 빔 스퍼터링을 이용한 $SnO_2$ 계 박막 가스 센서에 관한 연구
- Cha, Dong-Kwan (School of Metallurgical and Meterials Engineering, Yeungnam Univ.) ;
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Min, Bong-Ki
(School of Metallurgical and Meterials Engineering, Yeungnam Univ.) ;
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Choi, Soon-Don
(School of Metallurgical and Meterials Engineering, Yeungnam Univ.) ;
- Lee, Hee-Young (School of Metallurgical and Meterials Engineering, Yeungnam Univ.)
- Published : 2003.07.10
Abstract
Thin film