한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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- Pages.838-841
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- 2003
압전박막을 이용한 air-gap type FBAR 필터설계
Thin Film Bulk Acoustic Resonators(FBAR) filters design Air-gap type using piezoelectric thin film
- 정중연 (경원대학교 전자.전기정보공학부) ;
- 김용천 (경원대학교 전자.전기정보공학부) ;
- 김상종 (KIST 박막연구센터) ;
- 김경환 (경원대학교 전자.전기정보공학부) ;
-
윤석진
(KIST 박막연구센터)
;
- 최형욱 (경원대학교 전자.전기정보공학부)
- Jong, Jung-Youn (Gyeongwon Univ.) ;
- Kim, Yong-Chun (Gyeongwon Univ.) ;
- Kim, Sang-Jong (KIST) ;
- Kim, Kyung-Hwan (Gyeongwon Univ.) ;
-
Yoon, Seok-Jin
(KIST)
;
- Choi, Hyung-Wook (Gyeongwon Univ.)
- 발행 : 2003.07.10
초록
The aim of the study is to scrutinize the relationship between the area of resonance and insertion loss by analyzing the characteristics of 2-port resonator. This was done through designing an air-gap type Film Bulk Acoustic Resonator (FBAR) by using CAD model for the application of bandpass filter of high-frequency band with piezoelectric thin film. Moreover, through the design of ladder-type BPF, we were able to observe changes in bandwidth, resonation, out-of-band rejection depending on the number and area of resonator.