한국전자현미경학회:학술대회논문집

Korean Society of Microscopy (한국현미경학회)
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HRTEM Study of an Epitaxial C49-TiSi2 Phase Formed on the Si(100) Substrate

  • Yang, Jun-Mo (Memory Research & Development Division, Hynix Semiconductor Inc.) ;
  • Park, Tae-Soo (Memory Research & Development Division, Hynix Semiconductor Inc.) ;
  • Lee, Tae-Kwon (Memory Research & Development Division, Hynix Semiconductor Inc.) ;
  • Kim, Won (Memory Research & Development Division, Hynix Semiconductor Inc.) ;
  • Choi, Jin-Tae (Memory Research & Development Division, Hynix Semiconductor Inc.) ;
  • Lee, Soun-Young (Memory Research & Development Division, Hynix Semiconductor Inc.)
  • Published : 2003.11.01
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Abstract

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