대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2003년도 추계학술대회 논문집 전기물성,응용부문
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- Pages.322-325
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- 2003
$BCl_3/Cl_2$ /Ar 플라즈마를 이용한 BST 박막의 식각 특성
Etching characteristics of BST thin films using $BCl_3/Cl_2$ /Ar plasma
- 김관하 (중앙대학교 전자전기공학부) ;
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김동표
(중앙대학교 전자전기공학부) ;
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김창일
(중앙대학교 전자전기공학부) ;
- 이철인 (안산공과대학 전기과) ;
- 김태형 (여주대학 전기시스템디자인과)
- Kim, Gwan-Ha (School of Electrical and Electronics Engineering, Chung-Ang University) ;
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Kim, Dong-Pyo
(School of Electrical and Electronics Engineering, Chung-Ang University) ;
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Kim, Chang-Il
(School of Electrical and Electronics Engineering, Chung-Ang University) ;
- Lee, Chul-In (Dept. of Electrical Engineering, Ansan College of Technology) ;
- Kim, Tae-Hyung (Dept. of Electric System Designs, YeoJoe Institute of Technology)
- 발행 : 2003.10.31
초록
BST thin films were etched with inductively coupled plasmas. A chemically assisted physical etch of BST was experimentally confirmed by ICP under various gas mixtures. After a 20 % addition of
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