대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2003년도 추계학술대회 논문집 전기물성,응용부문
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- Pages.309-311
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- 2003
BLT 박막의 건식 식각 특성에 관한 연구
Dry Etching Characteristics of BLT Thin Film
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Kim, Dong-Pyo
(School of Electrical and Electronic Engineering, Chung-Ang University) ;
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Kim, Chang-Il
(School of Electrical and Electronic Engineering, Chung-Ang University)
- 발행 : 2003.10.31
초록
The effects of etch parameters on dry etching of BLT thin films were investigated with ICP etch system in
키워드