Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2003.10a
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- Pages.293-296
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- 2003
Fabrication of CNT(Carbon Nanotubes) Emitter for Mass Spectrometer
질량 분석기에 응용할 수 있는 탄소나노튜브를 이용한 전자방출원 제작
- Jeong, D.J. (Division of Electronics Engineering, AJOU University) ;
- Yoon, H.J. (Division of Electronics Engineering, AJOU University) ;
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Jung, K.W.
(Division of Electronics Engineering, AJOU University)
;
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Yang, S.S.
(Wonkwang University)
- Published : 2003.10.31
Abstract
We report on the fabrication and field emission of carbon nanotube field emitters for mass spectrometer. Due to its high aspect ratio and mechanical strength, we use vertically aligned multi-wall carbon nanotubes prepared by thermal chemical vapour deposition as cathodes, Electrons emitted from a CNT are to ionize some sample molecules. We have successfully attained patterned carbon nanotubes grown on two-dimensional 0.7 mm by 0.7 mm Ni square blocks on Si. The emission characteristics show that the field emission initiates at 200 V.
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