Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2003.10a
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- Pages.49-52
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- 2003
Design and fabrication of a single crystalline silicon micromirror array for biochip fabrication systems
바이오칩 제작 장치용 단결정 실리콘 마이크로 미러 어레이의 설계와 제작
- Jang, Yun-Ho (School of Electrical Engineering and Computer Science, Seoul National University) ;
- Lee, Kook-Nyung (School of Chemical Engineering, Seoul National University) ;
- Kim, Yong-Kweon (School of Electrical Engineering and Computer Science, Seoul National University)
- Published : 2003.10.31
Abstract
Single crystalline silicon (SCS) was adopted for a reliable micromirror array of biochip fabrication applications. SCS has excellent mechanical properties and smooth surface, which is the best material for micromirror devices. The mirror array has
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