A Resonant Type Inverter Power Conversion Equipment for Plasma Generator

플라즈마 발생장치용 공진형 인버터 전력변환장치

A resonant type voltage source and power device and a control method using Pulse Density Modulation(PDM) power control and Pulse Width Modulation(PWM)voltage control for plasma sterilization are described. For the stability of discharge in the generating tube, it is desirable that the peak apply voltage is constant. The PDM power control is employed for sustaining the voltage constant at any generating tube input power. Moreover, to avoid the influence of input AC voltage fluctuation etc., PWM voltage control with generating tube peak voltage feedback is used. Both functions were confirmed by the experiment with inverter and generating tube. The effect of input synchronous PDM method for input current stabilizing is confirmed also.