대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2003년도 학술회의 논문집 정보 및 제어부문 B
- /
- Pages.629-632
- /
- 2003
나노 스테이지용 압전 구동기의 퍼지 PI 제어기 설계
Design of Fuzzy PI Controller for Piezo Actuator of Nano Stage
- 발행 : 2003.11.21
초록
Piezo actuators are mainly used in precision position control system because of their high position resolution. Although there have been many approaches in open loop control of this, those method turn out to be not effective in precision control due to hysteresis and creep. To overcome the problems, closed loop PI control method is used in commercial products. However, it is very difficult to obtain fast response with conventional PI control although piezo actuator has fast response. In this paper, we propose a fuzzy PI control method with the proposed fuzzy PI controller, we obtains faster settling response over the conventional PI controller. We verify the effectiveness of the proposed method with experimental results.