한국반도체및디스플레이장비학회:학술대회논문집 (Proceedings of the Korean Society Of Semiconductor Equipment Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

12 인치 열-냉 척의 표면 열 변형 해석

  • 이상순 (한국기술교육대학교, 메카트로닉스 공학부) ;
  • 윤지영 (한국기술교육대학교, 메카트로닉스 공학부) ;
  • 김맹권 ((주) 세크론)
  • 발행 : 2003.12.01
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초록

In this study, the geometric modeling has been conducted for a new model of 12 inch hot-cold chuck using three-dimensional solid modeler, SolidWorks. Then, the heat transfer analysis and the thermal deformation analysis using FEM have been performed. The results of the analysis show the temperature distribution and the deformed shape of a new model of 12 inch hot-cold chuck. The evaluation for the surface flatness of a new model has been performed based on the deformed shape obtained from ANSYS.

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