Proceedings of the Korean Society Of Semiconductor Equipment Technology (한국반도체및디스플레이장비학회:학술대회논문집)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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퍼지 논리를 이용한 웨이퍼의 사이즈 추정 알고리즘

  • 권오진 (한국생산기술연구원) ;
  • 최성주 (한국기술교육대학교 기계공학부) ;
  • 조현찬 (한국기술교육대학교 정보기술공학부) ;
  • 김광선 (한국기술교육대학교 메카트로닉스공학부)
  • Published : 2003.05.01
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Abstract

This paper is concerned with the estimation of a wafer part in grasping system. The estimation of a wafer size in grasping system is very important because a wafer must be placed in accurate position. The accurate information of a wafer size should be forward to Robot in order to place a wafer in accurate position. So in this paper, we decide the size of a wafer with Fuzzy Logic and consider the possibility of this method by simulation.

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