Research for ultra precision linear motor by using piezo stack actuators

적층형 압전재료를 이용한 초정밀 선형 모터에 관한 연구

This paper is focused on the research of the ultra precision linear motor by using piezo stack actuators. The development of linear motor which can be controlled nano or micro scale is necessary for the precision manufacturing. Self-moving-cell principle is used for the design of linear motor Self-moving-cell linear motor is consisted of three cell structures, and each cell has two shells and one piezo-stack actuator. Each cell can do clamping and moving by two shell structures. The shell structure deformation by piezo stack actuator can move the linear motor by losing the clamping between the shall and guideway. This paper presents the design, manufacturing and test of the motor.