한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2003년도 춘계학술대회 논문집
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- Pages.1873-1876
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- 2003
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- 2005-8446(pISSN)
MR유체를 이용한 미세 채널구조물의 표면연마
Surface polishing of Micro channel using Magneto-Rheological fluid
초록
Magneto-rheological polishing is a new technology used in precision polishing. It utilizes magneto-rheological fluid. nonmagnetic polishing abrasive, aqueous carrier fluids in magnetic field to remove material from a part surface. Silicon micro channel as work piece is fixed in the slurry which is made of MR fluid and CeO
키워드