압전구동기에 사용되는 힌지 메커니즘의 기구학적 비선형성에 관한 연구

Study on the geometrical nonlinearity of the hinge mechanism used in a piezoactuator

Piezoactuator using a flexure hinge mechanism is often used in the precision stages. When the total size of the hinge mechanism become small compared with the deformation of the hinge mechanism, the geometrical nonlinearity makes a considerable error in the output displacement. In this research, the incremental method based on the matrix method is developed to model the effect of the geometrical nonlinearity. Developed modeling method is applied to derive the error of output displacement of the bridge-type hinge mechanism and its results are derived with respect to the design parameters. This method can be easily used to the design optimization of the hinge mechanism and analysis results show that the geometrical nonlinearity error should be considered to achieve a high accuracy to the piezoactuators.