한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2003년도 춘계학술대회 논문집
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- Pages.1170-1173
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- 2003
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- 2005-8446(pISSN)
2-Mode 초음파를 이용한 물체 이송에 관한 연구
A Study on Object Transport System Using 2-Mode Ultrasonic Wave
초록
In the semiconductor and the optical industry a new transport system which can replace the common system is required. The common systems are driven by magnetic field and conveyer belt. The magnetic field damages semiconductor and contact force scratches, the optical lens. The ultrasonic wave driven system solve these problem. In this paper the object transport system using the excitation of ultrasonic wave is proposed. the experiments for finding the optimal excitation frequency, finding phase-difference between two ultrasonic wave generators are performed. The effect of transporting speed according to the change of amplification voltage is verified. In addition, the system performance for actual use is evaluated
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