전자기력 보상방식의 힘 측정을 위한 평행도 오차 보상

Parallelism Error Compensation for Force Measurement by Electromagnetic Compensation

For micro-weighing, null balance method is widely used in the precision industrial fields, such as biomedicine, semiconductor, chemistry and so on. In order to obtain high resolution and large measurement range simultaneously, the mechanism should be analyzed and optimized. However, large measurement error can be generated according to the mass loading position and this error is called as a corner loading error. The corner loading error is caused by the parallelism error of a Roberval mechanism used to minimize it. The corner loading error is one of the most dominant error sources that should be removed. It is possible to design that the mechanism has no corner loading error theoretically, but the mechanism of the micro weighing device is very difficult to be realized as original design due to assembling and manufacturing error. For the required specification of the device, the precise manufacturing technique under a few $\mu\textrm{m}$ is required for the realization of the design. In this paper, the effects of the parallelism error are analyzed by using Lagrange method and verified by experiment. Also, the compensation mechanism is proposed and the corner loading error is reduced by restoring tile parallelism.