연 X-선 현미경을 위한 생체시료 고정장치 설계

Design of a specimen holder for living cell in the soft X-ray microscopy

To observe a hydrated biological specimen, an environmental chamber was necessary to keep the specimen in a wet state under vacuum surroundings. The specimen holder is as follows designed consequently. The specimen holder consisted of two Si wafers, the centers of which were Si$_3$N$_4$(100nm thickness) windows of a 0.3mm square. The windows were made by a photo-lithographic method. The transmission of a window at 400eV is about 70%. A hydrated biological specimen was put between the two windows. When the chamber was closed, two wafers were contact at the metal mesh by the pressure of O-rings, and the specimen holder moved by the three micrometers.