Dichromatic 투사광선에 따른 나노 미터 해상도의 점접촉 유막 두께 측정 연구

Study on the Measurement Technology of Fluid Film Thickness with Nanometer Scale by Dichromatic Incident Light

Many technologies are applied to the measurement of elastohydrodynamic lubrication (EHL) film thickness. In particular, optical in-situ interferometric method has many advantages in making the actual contact behaviors realized with the experimental apparatus. Careful selection of incident lights greatly enhances the fringe resolution up to nanometer scale by using image processing technology. In this work, it is found that dichromatic incident light can provide much finer resolution of EHL film thickness than monochromatic incident light, because it has much more variables of color components to be discriminated among the wavelengths of colors according the variations of EHL film thickness. Some simulated interferometric images are shown how the film thickness is resolutionized in nanometer scale