Electrostrictive Polymer를 이용한 마이크로-나노 플로터 메커니즘 개발

Development of Micro-Nano Plotting Mechanism using Electrostrictive Polymer

Although Hereafter a mass production will claim for patterning nano sized thickness or line in micro-nano industry. existent lithography fabrication has many usable fields, it has complex fabrication steps, expensive values and row work rates. Development of Dip-pen type nano plotter using polymer actuator can construct row cost mass production system because it will change existent lithography fabrication more simple and easy.