한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2003년도 춘계학술대회 논문집
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- Pages.260-263
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- 2003
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- 2005-8446(pISSN)
간섭계용 헬륨-네온 레이저의 주파수 안정화
Frequency stabilization of HeNe laser for interferometry
초록
Lasers are used as the source of the interferometers in the industrial field. These lasers need 2 requirements. The first is the narrow linewidth of laser for the long coherence length. The second is the stabilized frequency of laser for the precision measurement. Now HeNe lasers are mostly used and the frequency stability is about 10