Proceedings of the Korean Institute of Information and Commucation Sciences Conference (한국정보통신학회:학술대회논문집)

The Korea Institute of Information and Commucation Engineering (한국정보통신학회)
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Cobalt (Co) Electrode FBAR Devices Fabricated on Seven-Layered Bragg Reflectors and Their Resonance Characteristic

  • Mai Linh (Information and Communications University (ICU)) ;
  • Munhyuk Yim (Information and Communications University (ICU)) ;
  • Kim, Dong-Hyun (Information and Communications University (ICU)) ;
  • Giwan Yoon (Information and Communications University (ICU))
  • Published : 2003.10.01
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Abstract

In this paper, cobalt (Co)-electrode FBAR devices fabricated on seven-layered Bragg Reflectors are presented along with their resonance characteristics. ZnO films are used as the resonating material in FBAR devices where the Co electrode is 3000$\AA$ thick. All processes are preformed in an RF magnetron sputtering system. As a result of characterization, the resonance characteristics are observed to depend strongly on the quality of ZnO film and Bragg Reflectors. In addition, the FBAR devices with W/SiO$_2$ reflectors show good resonance characteristics in term of return loss and quality-factor (Q-factor).

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